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The system and the mechatronics of a pagoda type micro-CMM

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : The system and the mechatronics of a pagoda type micro-CMM
นักวิจัย : Fan, Kuang-Chao , Cheng, Fang , Wang, Hung-Yu , Ye, Jyun-Kuan
คำค้น : -
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Fan, K.-C., Cheng, F., Wang, H.-Y., & Ye, J.-K. (2012). The system and the mechatronics of a pagoda type micro-CMM. International Journal of Nanomanufacturing, 8(1/2), 67-86. , http://hdl.handle.net/10220/16965 , http://dx.doi.org/10.1504/IJNM.2012.044656
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : International journal of nanomanufacturing
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

This paper presents design considerations of a precision micro-CMM system and its mechatronic modules. The basic design concept is to meet the requirements of high stiffness, force balance, thermal balance, Abbe principle, metrology frame and vibration-free. Based on these criteria, a novel bridge of pagoda shape is designed and analysed by optimisation to verify its superior stiffness with force balance and thermal balance structure due to its symmetrical geometry. A high precision Z-ram design with co-axial counterweight and vibration suppression is presented. The design of a novel symmetrical coplanar XY-stage that observes the Abbe principle is explained. This micro-CMM has a measurement range of X: 20 mm, Y: 20 mm and Z: 10 mm. Driven by a commercial ultrasonic motor and fed back by a designed diffraction interference scale, each axis can achieve long stroke and nano-positioning motion. Adding a designed contact scanning measuring probe to the spindle, this system is able to measure any geometry of a part to nanometre resolution.

บรรณานุกรม :
Fan, Kuang-Chao , Cheng, Fang , Wang, Hung-Yu , Ye, Jyun-Kuan . (2555). The system and the mechatronics of a pagoda type micro-CMM.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Fan, Kuang-Chao , Cheng, Fang , Wang, Hung-Yu , Ye, Jyun-Kuan . 2555. "The system and the mechatronics of a pagoda type micro-CMM".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Fan, Kuang-Chao , Cheng, Fang , Wang, Hung-Yu , Ye, Jyun-Kuan . "The system and the mechatronics of a pagoda type micro-CMM."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Fan, Kuang-Chao , Cheng, Fang , Wang, Hung-Yu , Ye, Jyun-Kuan . The system and the mechatronics of a pagoda type micro-CMM. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.